EquipmentTool Owner

Orientation Training

CleanroomZuzanna Lewicka
Process ReviewZuzanna Lewicka

Characterization and Metrology

Filmetrics F40UV ReflectometerDaniel Woodie
Gaertner EllipsometerDaniel Woodie
Hitachi S-4700 SEMRoman Akhmechet
Keyence Confocal MicroscopeDaniel Woodie
Keyence VHX6000Daniel Woodie
KLA Tencor P-15 ProfilometerDaniel Woodie
Probe Station 4200A-SCSJoe Palmer
Signatone Sheet Resistivity Measurement SystemJoe Palmer

Deposition - ALD and CVD

Oxford ICP-CVDZuzanna Lewicka
Savannah ALDZuzanna Lewicka

Deposition - PVD

Angstrom Covap Thermal EvaporatorJoe Palmer
Angstrom Dielectrics SputtererJoe Palmer
Angstrom Dual Chamber E-beam EvaporatorJoe Palmer
Angstrom Metals SputtererJoe Palmer
Angstrom Metals Sputterer 2Joe Palmer
Angstrom Nexdep E-beam EvaporatorJoe Palmer
SEM SputterZuzanna Lewicka

Lithography

Automatic Develop StationRoman Akhmechet
Heidelberg DWL66+ Roman Akhmechet
Nanonex NanoimprinterRoman Akhmechet
Photoresist SpinnersRoman Akhmechet
Polos Chrome Etch ProcessorRoman Akhmechet
Raith e-Line E-beam WriterZuzanna Lewicka
Raith EBPG 5150 E-beam WriterZuzanna Lewicka
Suss MA6 Mask AlignerRoman Akhmechet
Suss MJB4 Mask AlignerRoman Akhmechet
YES Vacuum OvenRoman Akhmechet

Packaging

ADT Dicing SawBert Harrop
K&S 4124 Gold Ball BonderBert Harrop
K&S Wedge Wire BonderBert Harrop
Logitech Lapping/Polishing SystemsBert Harrop
Loomis LSD-100 Scribe/diceBert Harrop
Mitutoyo Litematic Height GaugeBert Harrop
Questar Wedge Wire BonderBert Harrop
Tape DispensersBert Harrop
Tresky Flip Chip BonderBert Harrop
UV Curing SystemBert Harrop
West-Bond Manual Epoxy Die BonderBert Harrop

Plasma Etch

Oxford PlasmaPro80 RIERoman Akhmechet
PlasmaTherm 720 SLR RIERoman Akhmechet
PlasmaTherm Takachi III-VRoman Akhmechet
PlasmaTherm Takachi SLR (Diamond)Roman Akhmechet
PlasmaTherm Takachi SLR (Metals) Roman Akhmechet
PlasmaTherm VersalineRoman Akhmechet
SAMCO 200iPB RIE III-VRoman Akhmechet
SAMCO 800iPB Deep RIE (si)Roman Akhmechet
TePla O2 EtcherRoman Akhmechet

Soft Materials Processing

Form2 3D PrintersRoman Akhmechet
Heidelberg microPG101 Roman Akhmechet
KLA Tencor D-120 ProfilometerRoman Akhmechet
NanoScribe PPGT2 3D PrinterRoman Akhmechet
PDMS Processing ToolsRoman Akhmechet

Surface Chemistry and Wet Processing

Acid and Base HoodsZuzanna Lewicka
Critical Point DryerJoe Palmer
RCA HoodZuzanna Lewicka
Semi-Tool Spin Rinse DryersRoman Akhmechet
Ultraviolet / Ozone Cleaning SystemJoe Palmer
VWR 1410 Vacuum OvenJoe Palmer

Thermal Processing

CVD 2 Stack FurnaceJoe Palmer
CVD Equipment 1034 Atmospheric FurnacesZuzanna Lewicka
SSI Solaris 150 RTP Systems (x2)Zuzanna Lewicka