Equipment
Tool Owner
Orientation Training
Cleanroom
Zuzanna Lewicka
Process Review
Zuzanna Lewicka
Characterization and Metrology
Filmetrics F40UV Reflectometer
Daniel Woodie
Gaertner Ellipsometer
Daniel Woodie
Hitachi S-4700 SEM
Roman Akhmechet
Keyence Confocal Microscope
Daniel Woodie
Keyence VHX6000
Daniel Woodie
KLA Tencor P-15 Profilometer
Daniel Woodie
Probe Station 4200A-SCS
Joe Palmer
Signatone Sheet Resistivity Measurement System
Joe Palmer
Deposition - ALD and CVD
Oxford ICP-CVD
Zuzanna Lewicka
Savannah ALD
Zuzanna Lewicka
Deposition - PVD
Angstrom Covap Thermal Evaporator
Joe Palmer
Angstrom Dielectrics Sputterer
Joe Palmer
Angstrom Dual Chamber E-beam Evaporator
Joe Palmer
Angstrom Metals Sputterer
Joe Palmer
Angstrom Metals Sputterer 2
Joe Palmer
Angstrom Nexdep E-beam Evaporator
Joe Palmer
SEM Sputter
Zuzanna Lewicka
Lithography
Automatic Develop Station
Roman Akhmechet
Heidelberg DWL66+
Roman Akhmechet
Nanonex Nanoimprinter
Roman Akhmechet
Photoresist Spinners
Roman Akhmechet
Polos Chrome Etch Processor
Roman Akhmechet
Raith e-Line E-beam Writer
Zuzanna Lewicka
Raith EBPG 5150 E-beam Writer
Zuzanna Lewicka
Suss MA6 Mask Aligner
Roman Akhmechet
Suss MJB4 Mask Aligner
Roman Akhmechet
YES Vacuum Oven
Roman Akhmechet
Packaging
ADT Dicing Saw
Bert Harrop
K&S 4124 Gold Ball Bonder
Bert Harrop
K&S Wedge Wire Bonder
Bert Harrop
Logitech Lapping/Polishing Systems
Bert Harrop
Loomis LSD-100 Scribe/dice
Bert Harrop
Mitutoyo Litematic Height Gauge
Bert Harrop
Questar Wedge Wire Bonder
Bert Harrop
Tape Dispensers
Bert Harrop
Tresky Flip Chip Bonder
Bert Harrop
UV Curing System
Bert Harrop
West-Bond Manual Epoxy Die Bonder
Bert Harrop
Plasma Etch
Oxford PlasmaPro80 RIE
Roman Akhmechet
PlasmaTherm 720 SLR RIE
Roman Akhmechet
PlasmaTherm Takachi III-V
Roman Akhmechet
PlasmaTherm Takachi SLR (Diamond)
Roman Akhmechet
PlasmaTherm Takachi SLR (Metals)
Roman Akhmechet
PlasmaTherm Versaline
Roman Akhmechet
SAMCO 200iPB RIE III-V
Roman Akhmechet
SAMCO 800iPB Deep RIE (si)
Roman Akhmechet
TePla O2 Etcher
Roman Akhmechet
Soft Materials Processing
Form2 3D Printers
Roman Akhmechet
Heidelberg microPG101
Roman Akhmechet
KLA Tencor D-120 Profilometer
Roman Akhmechet
NanoScribe PPGT2 3D Printer
Roman Akhmechet
PDMS Processing Tools
Roman Akhmechet
Surface Chemistry and Wet Processing
Acid and Base Hoods
Zuzanna Lewicka
Critical Point Dryer
Joe Palmer
RCA Hood
Zuzanna Lewicka
Semi-Tool Spin Rinse Dryers
Roman Akhmechet
Ultraviolet / Ozone Cleaning System
Joe Palmer
VWR 1410 Vacuum Oven
Joe Palmer
Thermal Processing
CVD 2 Stack Furnace
Joe Palmer
CVD Equipment 1034 Atmospheric Furnaces
Zuzanna Lewicka
SSI Solaris 150 RTP Systems (x2)
Zuzanna Lewicka